


| Mill diameter (D) | $200, Yu 246, 303 inside, 350 inside etc |
|---|---|
| Inner diameter (d) | $158, $190, $240, $274, etc. |
| Number of teeth (pcs) | 28, 32, 69, etc. |
| Mesh (#) | 320#~15000# |
| Processing object | 6-inch, 8-inch, 10-inch wafers |
| Equipment speed (r) | 25000-50000r/min |
| Feed rate (vf) | Roughness <4µm/s, fine <0.4µm/s |
| Grinding amount (ae) | Coarse <0.6mm, fine <0.03mm |